q=%E8%B6%85%E7%B2%BE%E5%AF%86%E6%B0%94%E6%B5%AE%E5%AE%9A%E4%BD%8D%E5%B7%A5%E4%BD%9C%E5%8F%B0%E6%8A%80%E6%9C%AF%EF%BC%9A%E6%B0%94%E6%B5%AE%E7%B3%BB%E7%BB%9F%E5%8A%A8%E5%8A%9B%E5%AD%A6%E4%B8%8E%E6%8E%A7%E5%88%B6%EF%BC%9Adynamics+and+control+of+the+gas%5C-lubricated+system&searchType=standard&isFacet=true&view=standard&rows=10&sortWay=score&sortOrder=desc&curlibcode=CSZYXY&searchWay0=marc&logical0=AND
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超精密气浮定位工作台技术：气浮系统动力学与控制：dynamics and control of the gas-lubricated system