Micro-electro-mechanical system dynamics 并列题名：Micro-electro-mechanical system dynamics New micro-electro-mechanical systems and devices microelectromechanical systems. Microelectromechanical systems. Micro-opto-electro-mechanical systems 并列题名：New micro-electro-mechanical systems and devices Nanoelectromechanical systems Smart electromechanical systems nanoelectromechanical systems.