New micro-electro-mechanical systems and devices 并列题名：New micro-electro-mechanical systems and devices Micro-electro-mechanical system dynamics 并列题名：Micro-electro-mechanical system dynamics microelectromechanical systems. Microelectromechanical systems. nanoelectromechanical systems. Smart electromechanical systems Electromechanical motion devices Micro-opto-electro-mechanical systems