q=micro%5C-nanofabrication+technologies+and+applications&searchType=standard&isFacet=true&view=standard&rows=10&sortWay=score&sortOrder=desc&curlibcode=YT&searchWay0=marc&logical0=AND
rows=10&curlibcode=YT&searchWay0=marc&logical0=AND
Micro-nanofabrication technologies and applications